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KMID : 0381920150450040208
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Korean Journal of Microscopy
2015 Volume.45 No. 4 p.208 ~ p.213
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Advanced Methodologies for Manipulating Nanoscale Features in Focused Ion Beam
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Kim Yang-Hee
Seo Jong-Hyun
Lee Ji-Yeong
Ahn Jae-Pyoung
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Abstract
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Nanomanipulators installed in focused ion beam (FIB), which is used in the lift-out of lamella when preparing transmission electron microscopy specimens, have recently been employed for electrical resistance measurements, tensile and compression tests, and in situ reactions. During the pick-up process of a single nanowire (NW), there are crucial problems such as Pt, C and Ga contaminations, damage by ion beam, and adhesion force by electrostatic attraction and residual solvent. On the other hand, many empirical techniques should be considered for successful pick-up process, because NWs have the diverse size, shape, and angle on the growth substrate. The most important one in the insitu precedence, therefore, is to select the optimum pick-up process of a single NW. Here we provide the advanced methodologies when manipulating NWs for in-situ mechanical and electrical measurements in FIB.
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KEYWORD
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Focused ion beam, Nanomanipulator, Nanowire, Rotation tip, Gripper
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